
| Unit | 50Hz | 60Hz | ||
|---|---|---|---|---|
| Designed Pumping Speed | ℓ / min | 4600 | 5800 | |
| Effective Pumping Speed | ℓ / min | 4350 | 5220 | |
| Ultimate vacuum | Gas V/V Close | Torr(Pa) | 1.0 X 10-3(1.3 X 10-1) | |
| Gas V/V Open | Torr(Pa) | 2.2 X 10-2(3) | ||
| Motor power | 3Φ | KW | 7.5 | |
| Oil capacity | Max | ℓ | 28 | |
| Min | ℓ | 18 | ||
| Cooling | Water cooling | |||
| Cooling water flow | 7.5(at 20℃) | |||
| Inlet connection | ISO 63 | |||
| Outlet connection | ISO 40 | |||
| Weight | kg | 242 | ||
| Oil | MR-200 | |||
