
| Reference | LUAVB 25 | LUAVB 40 |
|---|---|---|
| Flange Size | CF 35 | CF 63 |
| Conductance ( l/s) | 30 | 65 |
| Leak Rate (Pa·l/s) | Below 1.0 X 10-10 | |
| Differential Pressure on Valve Seat | 1.3 | |
| A:Body B:Sealing Material | A : SUS 304 B : VITON | |
| Life Cycle | 300,000( Room Temperature ) | |
| Air Pressure ( kgf / ㎠ ) | 3~5 | |
| Baking Temperature(℃) | Open 150, Close 125 | |
| Air Cylinder(ml) | 20 | 25 |
| Weight(Kg) | 2.7 | 6.4 |
| A(mm) | 60 | 85 |
| B(mm) | 132 | 157 |
| C(mm) | 193 | 237 |
| ΦD(mm) | 70 | 114 |
| E(mm) | 55 | 63 |
| F(mm) | 8 | 8 |
| ΦG(mm) | 86 | 114 |
| N(mm) | 1/8 | 1/8 |