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게이지 Gauge
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FTR-1

Floor Plan

Technical Specification
Full-Scale range 133kPa
Display resolving power 1ppm @ F.S.
Precision 0.1% R (at 23℃)
Zero temperature Coefficient between 10 to 50℃ of service temperature
Temperature Coefficient span between 10 to 50℃；of sew ice temperature
Data-renewalrate 2.2 msec MAX
Digital Communication 4-line system, all dual ch.
Output signal DC0V- 10V
Set point output 3-points, photo-coupler; 30VDCt 0.2 A or Iess
hput power non-heating type- +24 VDC 0+2 A MAX
Ambient temperature at operation： 10 to 50"C at Storage:-10 to 70℃
Material used in vacuum part Silicon, SiO2. SUS3O4, Viton
Features
  • 펄스신호 전송방식-노이즈 내성강화
  • 고속데이터 통신 및 단시간 자동영보정이 가능
  • 부식성이 없는 곳은 전부 가능(반도체 사용안됨)
  • 센서 실리콘
  • 고분해 능력 (표시분해능력 1/1,000,000)
  • 사용용도 : 성막장치, 가스치환, 가스봉입, 진공증류, 진공건조 등의 압력 모니터링
  • Resolving power of display : 6 1/2 orders of magnitude (digits) (about 2 digits improved vs. conventional)
  • Precision : 01.% R
  • Notable improvement in noise resistance due to pulsed sigmal transmission
  • High-speed data communication and automatic zero-point correction possible
  • 1/2 or less of unit volume vs. conventional
  • Process pressure monitoring for film-making device
  • Pressure monitoring for gas-replacement and gas-inclusion
  • Pressure monitoring for vaccum distillation, drying, etc
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